Reactors

Technical specifications
Customized process chamber	Material: steel Aisi 304 Dimensions: depending on specific application
Pressure process	1 mTorr - 900 mTorr
Vacuum measurement	Baratron gauge
Generator	Custom designed for specifics application (RF Power, 13.56 MHZ)
Pumping system	Rotary-Roots or Turbo pumps group
PLC	PLC with touch screen to run the process automatically, defines recipes, gas flow, working pressure, process time, forward RF power
Process gas	1-5 gas lines with MFC (Mass Flow Controller) and/or VSC ( Vapour Source Controller)
Safety features	Emergency switch-off, vacuum interlock, over temperature interlock, CE-label
Process gas connection	¼"-Swagelok-fitting
Input pressure	1 Bar

Options: data logging, additional gas channels, customized loading tray

Technical specifications
Standard process chamber	Material: steel Aisi 304 Inside Dimensions: depending on roll dimension
Core diameter	Ø custom designed
Web speed	0.1-15 m per minute (depending on plasma process)
Pressure process	1 mTorr - 900 mTorr
Vacuum measurement	Baratron gauge
Generator	Custom designed for specifics application (RF Power, 13.56 MHZ)
Pumping system	Rotary-Roots or Turbo pumps group
PLC	PLC with touch screen to run the process automatically, defines recipes, gas flow, working pressure, process time, forward RF power, web speed
Process gas	1-5 gas lines with MFC (Mass Flow Controller) and/or VSC ( Vapour Source Controller)
Safety features	Emergency switch-off, vacuum interlock, over temperature interlock, CE-label
Process gas connection	¼"-Swagelok-fitting, input pressure 1 Bar

Options: data logging, additional gas channels, customized loading tray

Technical specifications
Standard process chamber	Material: steel Aisi 304 Inside Dimensions: depending on barrels dimension Volume: custom designed size
Pressure process	1 mTorr - 900 mTorr
Vacuum measurement	Baratron gauge
Generator	Custom designed for specifics application (RF Power, 13.56 MHZ)
Pumping system	Rotary-Roots or Turbo pumps group
PLC	PLC with touch screen to run the process automatically, defines recipes, gas flow, working pressure, process time, forward RF power, rotation speed
Process gas	1-5 gas lines with MFC (Mass Flow Controller) and/or VSC ( Vapour Source Controller)
Safety features	Emergency switch-off, vacuum interlock, over temperature interlock, CE-label
Process gas connection	¼"-Swagelok-fitting, input pressure 1 Bar

Options: data logging, additional gas channels, customized loading tray